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Reactive Sputter Deposition (Springer Series in Materials Science)
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Author Name:    Depla, D.

Title:   Reactive Sputter Deposition (Springer Series in Materials Science)

Binding:   Hardcover

Book Condition:   New

Publisher:    Springer 

ISBN Number:   3540766626 / 9783540766629

Seller ID:   ING9783540766629

3540766626 Special order direct from the distributor

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In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process. Hence, this book gives necessary information for those who want to start with reactive magnetron sputtering, understand and investigate the technique, control their sputtering process and tune their existing process, obtaining the desired thin films.



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